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NGS - Automated Microscope for CD, Overlay, and Defect Detection System

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The NGS Series includes advanced systems designed to automate optical defect detection and precision dimensional measurements on wafers and other components. These systems are perfectly adapted for both production uses and versatile process development, offering dual functionality. Integrating high-end microscope components from Olympus, Nikon, and Leica, they provide a range of illumination options like brightfield (BF), darkfield (DF), and differential interference contrast (DIC). Precision is emphasized with linear motor staging that features 0.02-micron scales. The NGS Series can be customized based on specific requirements with platforms accommodating up to 200mm or 300mm, as well as robotic platforms for automated handling of wafers and parts.
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Automatic Defect Detection & Classification
Automated Die Inspection
Precision Dimensional Metrology
Critical Dimension (CD) and Overlay Metrology Automatic and Manual Operation

  • VCSEL CD Measurement
  • Surface & Edge Defect Detection
  • Texture Defect Detection (e.g. stains, etc.)
  • Missing or Deformed Object Detection
  • Extensive Defect Review Capability
  • Graphic Maps & Image Archival
  • CAD file import

The NGS Series defect detection and metrology systems are designed for applications where automated optical defect detection and precision dimensional measurements on wafers and other parts are required. They are well suited for dual use as production tools or as versatile process development systems. These systems offer a choice of high end microscope components (Olympus/Nikon/Leica), BF/ DF/ DIC illumination, and linear motor staging with 0.02 micron scales. There are several configurations available depending on your requirements. These include:a 200mm platform, a 300mm platform and a robotic platform for automated wafer and part handling.