Intego GmbH products

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Intego - Ingot Inspection

From the silicon raw material, crystal ingots are grown, which are sawn into the silicon blocks. It is reasonable to sort out faulty parts as soon as possible or, even better, to avoid processing them. Our ORION silicon block inspection systems offer a fully automated solution for inspection prior to the two process steps of polishing and wafer sawing:

Intego - Wafer Inspection System

Due to high added value in the production steps, it is important to guarantee frictionless operation and to avoid production shutdowns, particulary due to wafer breakage. Therefore, wafers with structural defects, e.g. cracks, saw marks or chippings should be detected and separated out.