Nova Ltd products

The Nova ASTERA™ Prime provides stand-alone level performance in a compact form factor of integrated metrology. Utilizing oblique and normal incidence channel measurements, Nova ASTERA™ Prime provides an unmatched level of accuracy, precision, tool-to-tool matching and extendibility.

The Nova i570® HP is the leading member of the Nova i570® product Family. It is Nova’s most advanced integrated metrology platform that provides the highest metrology performance, process control and productivity capabilities. Targeting manufacturing of most advanced logic and memory technology nodes.

The first in-line SIMS for statistical process control (SPC) of compositional profiles. Meet Nova METRION®: a fully-automated SIMS product validated for in-line production process control.  Nova METRION®  takes repetitive measurements out of the lab and into the fab where the time-sensitive information is critical for SPC.  Moving the capability into the fab, and enabling full-wafer mapping, shortens the time to feedback, and provides a quick ROI, by identifying process excursions when they occur, preventing scrap and expensive rework. 

Optical Material Metrology platform implementing Raman spectroscopy in the fab. The Nova ELIPSON™ is a high-end standalone metrology system, optimized for measuring material properties such as composition, strain, crystallinity and surface properties, for both memory and logic segments. The platform utilizes Raman spectroscopy for Optical Material Metrology (OMM) to extract material properties of the areas under analysis. This smart, data-rich platform allows new information to flow fast on the production floor, bringing research-grade capabilities to the fab, from R&D to high volume manufacturing (HVM) stages.  

Inline continuous Direct Metal Replenishment (DMR) for cleanrooms environment. Nova DMR offers economical replenishment of metals in a plating bath. This significantly extends the bath chemicals’ lifetime and improves the plater utilization. DMR provides fully automatic powder container docking for uninterrupted operation and eliminates the constant increase in bath volume, reducing the need for bleed and feed or full bath dump. Thus, reducing environmental impact and minimizing operational risks and costs. The platform integrates with Nova ANCOLYZER® and can directly connect to any process tools.