Nova Ltd products

The first in-line SIMS for statistical process control (SPC) of compositional profiles. Meet Nova METRION®: a fully-automated SIMS product validated for in-line production process control.  Nova METRION®  takes repetitive measurements out of the lab and into the fab where the time-sensitive information is critical for SPC.  Moving the capability into the fab, and enabling full-wafer mapping, shortens the time to feedback, and provides a quick ROI, by identifying process excursions when they occur, preventing scrap and expensive rework. 

Optical Material Metrology platform implementing Raman spectroscopy in the fab. The Nova ELIPSON™ is a high-end standalone metrology system, optimized for measuring material properties such as composition, strain, crystallinity and surface properties, for both memory and logic segments. The platform utilizes Raman spectroscopy for Optical Material Metrology (OMM) to extract material properties of the areas under analysis. This smart, data-rich platform allows new information to flow fast on the production floor, bringing research-grade capabilities to the fab, from R&D to high volume manufacturing (HVM) stages.