Tokyo Electron Limited (TEL) products

CLEAN TRACK™ LITHIUS Pro™ Z is TEL`s most advanced 300mm coater/developer for the 10nm technology node and beyond. It incorporates user-friendly operation, flexible configurations for future processes, and automated monitoring technology to support a wide range of applications from next generation development to high volume mass production. Compared to the previous generation LITHIUS Pro™ and Pro V, the LITHIUS Pro™ Z improves performance in three key areas - defectivity, productivity, and CoO (Cost of Ownership). CLEAN TRACK™ LITHIUS Pro™ Z offers increased process flexibility to support advanced immersion lithography, including double and multiple patterning schemes as well as EUV process.

CLEAN TRACK™ LITHIUS Pro™ V incorporates all of the advanced technology of the proven CLEAN TRACK™ LITHIUS Pro™ V. It enables higher throughput, increases wafers per day, and improves overall equipment efficiency. Additionally, it also meets industry requirements for versatile lithography equipment capable of leading edge processes, including double patterning.