VLSI Standards, Inc. products

CREATE YOUR OWN STANDARDS. The Certified silica solutions are used to generate calibration standards for your instruments and characterize your own process.

NOURISH YOUR THIN FILM THICKNESS MEASUREMENT STANDARDS.Use the Thin Film Thickness Standard (FTS) to verify the accuracy of single wavelength or spectroscopic ellipsometers (SWE or SE) and reflectometers. The thin film thickness measurement standards also allow you to monitor long term tool stability in support of ISO and TS accreditation programs, and eliminate the unwanted effects of airborne molecular contamination (AMC) on your measurements.

STAY IN LINE WITH SUB-100 NM ACCURACY CALIBRATION.The NanoCD™ (NCD) is the first commercially available calibration standard to provide line width accuracy calibration at the 130 nm, 90 nm and 45 nm nodes. Use this line width accuracy calibration standard for tool matching, calibrating the line width CD-AFM tip or diagnostics in a CD-SEM, and prevent bias from ever leaving the mask shop.

RESISTANCE CALIBRATION NEED NOT BE FUTILE. Resistivity Standards (RS) span 4 decades and are designed for resistance calibration of both contact and non-contact resistivity measuring instruments. The resistance calibration standard is created by sawing a doped single crystalline ingot into wafers, lapping and chemically cleaning them to VLSI Standards` specifications.

ITO SHEET RESISTIVITY STANDARDS: THE FINISHING TOUCH FOR FLAT PANEL METROLOGY. Indium Tin Oxide Sheet Resistance Standards (ITOSRS) from VLSI Standards are traceable products, intended for calibration standard of both contact and non-contact ito sheet resistance measurement tools used in the LCD, flat panel and touch-screen markets.

RESISTANCE CALIBRATION NEED NOT BE FUTILE. Resistivity Standards (RS) span 4 decades and are designed for resistance calibration of both contact and non-contact resistivity measuring instruments. The resistance calibration standard is created by sawing a doped single crystalline ingot into wafers, lapping and chemically cleaning them to VLSI Standards` specifications.

TAKING PROFILER CALIBRATION STANDARDS A STEP FORWARD. Step Height Standards (SHS) are designed for the calibration of mechanical or optical surface profiler standards. These optical or mechanical profiler calibration standards consist of a 25 mm x 25 mm x 6.35 mm quartz block with a precisely etched uniform bar along with various test and diagnostic features. The choice of the material for manufacturing the optical or mechanical profiler calibration standard-an ultra smooth quartz photomask blank-assures a very flat and smooth working surface as well as parallelism of the top and bottom surface within a few seconds of arc.