The Right People

At VLSI Standards, we have talented and diverse personnel who bring with them the highest level of scientific backgrounds and competent methodologies. Our scientists have earned numerous patents, developed innovative methods for correlating measurement results between different metrology calibration instruments, and established measurement techniques in important areas such as Dimensional Standards, Contamination Standards, Film Thickness Standards, and Resistivity Standards. We are active participants in the definition of industry roadmaps and in the development of the calibration standards to support the metrology needs of evolving technologies. Additionally, we value our partnership with national metrology institutes around the world, as reflected in numerous joint publications. We maintain a close relationship with the National Institute of Standards and Technology (NIST) as the auditor of our laboratory accreditation.

The Right Approach

Developing a positive partnership and collaboration with our customers is our approach to the science and business of making metrology calibration standards. Our scientists routinely work directly with customers to provide metrology calibration solutions. Additionally, we provide a full range of support including a recleaning / recertification service, and a commitment to provide advice for product application and use. Even before you purchase a standards metrology product, our worldwide sales representatives will work with you to determine exactly what types of products or services best meet your calibration or metrology needs.

We believe that the best way to work with our customers is to provide the highest level of honesty and integrity in both our advice and our services.

VLSI Standards, Inc. Downloads

VLSI - Resistance Calibration Standards Bare Silicon Wafer - Brochure

Quartz - Step Height Standards Wafer (SHS) - Brochure

VLSI - Silica Particle Solutions (SPS) -Brochure

VLSI - Resistivity Standard (RS) Wafers - Brochure

VLSI - Resistance Standards ITO Sheet (ITOSRS) - Brochure

VLSI - Model NanoCD Standards (NCD) - Small Chip - Brochure

VLSI - Silicon Dioxide Film Thickness Standards - Brochure