Hiden Analytical - Model EP-Replayer - Data Replay for Predictive End Point and Process Optimisation - Brochure

Hiden EP-Replayer allows IMP-EPD users to playback previous etch data to help create and optimise End Point recipes. Users can define variables in the algorithmic recipe template, then replay the data and watch in real-time to see the precise expected End Point for the given data and parameters. As with a live data acquisition, the Events Log records timestamps, state changes and key count rates, and the Chart Marker graph displays the End Point progress. The EP-Replayer gives users the freedom to test different End Point methods and more advanced recipe template features, with minimal wafer consumption, to build a more robust, repeatable and cost-effective etch process.