Vaisala K-PATENTS - Model PR-33-S - Semicon Refractometer - Brochure

A compact refractometer with an ultra pure modified PTFE flow cell body for semiconductor liquid chemical processes. Connected to the process by a ¼ — 1 inch pillar or flare fitting. Vaisala K-PATENTS® Semicon Refractometer PR-33-S monitors the fab chemicals` concentration in cleanroom environment and in the integrated process tools (blending, clean, etch, and CMP).