VLSI - Model NanoCD Standards (NCD) - Small Chip - Brochure

STAY IN LINE WITH SUB-100 NM ACCURACY CALIBRATION.The NanoCD™ (NCD) is the first commercially available calibration standard to provide line width accuracy calibration at the 130 nm, 90 nm and 45 nm nodes. Use this line width accuracy calibration standard for tool matching, calibrating the line width CD-AFM tip or diagnostics in a CD-SEM, and prevent bias from ever leaving the mask shop.