VLSI - Resistivity Standard (RS) Wafers - Brochure

RESISTANCE CALIBRATION NEED NOT BE FUTILE. Resistivity Standards (RS) span 4 decades and are designed for resistance calibration of both contact and non-contact resistivity measuring instruments. The resistance calibration standard is created by sawing a doped single crystalline ingot into wafers, lapping and chemically cleaning them to VLSI Standards` specifications.