VLSI - Silicon Dioxide Film Thickness Standards - Brochure

NOURISH YOUR THIN FILM THICKNESS MEASUREMENT STANDARDS.Use the Thin Film Thickness Standard (FTS) to verify the accuracy of single wavelength or spectroscopic ellipsometers (SWE or SE) and reflectometers. The thin film thickness measurement standards also allow you to monitor long term tool stability in support of ISO and TS accreditation programs, and eliminate the unwanted effects of airborne molecular contamination (AMC) on your measurements.