Highvac Corporation

Highvac Corporation

- Abatement System



The EcoGuard™ abatement system is an integration of a thermal pyrolytic / oxidizer, two-stage water absorber (scrubber) and gas cooler. It uses a liquid re-circulation pump and a holding tank with an auto top-off feature. The system is controlled and monitored by a PLC and touch panel interface module. It will run up to four process tools. Fuel-on-demand feature and flashback controller are built into the PLC. Turnkey, modular and rugged design makes it an easy solution to your abatement concerns. Highvac has a full line of Point of Use (PoU) thermal and wet, gas abatement products.

Industries include: Semiconductor, LED, Solar and VOC.

Our EcoGuard™ products are designed to destroy and eliminate hazardous by-products, vs. capturing the by-products for further, costly, hazardous waste disposal. The EcoGuard™ product line also offers a low-operating-cost solution for process and abatement savings through an innovation known as the “On-Demand” Control Program. Using sensor-driven process signals, operators can control the type of abatement required for the particular gas and only use what is necessary to abate and emit clean air to the environment.

Existing abatement solutions aim to scrub then dispose of hazardous by-products created during the production of LCD, Semiconductor and Solar products. With increasing regulations, and the high cost associated with utilities such as power and water the common “wet scrubbers” and “chemical adsorption” methods utilized by such technologies have become inefficient.

Why EcoGuard™?

Low Cost

Lowest cost-to-operate of any Gas Abatement System available today

Fuel and Power Efficiency

Ultra-low levels of utility usage including power, water, fuel and air

Standards Compliance and Beyond

Standards Compliance and Beyond – NOx, and other toxic gas levels well below environmental standards limits

Seriously Green

Zero carbon dioxide emissions when using H2 as fuel.

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