- Home
- Companies
- Accutherm Industrial Co., Ltd.
- Products
- AccuTherm - Model MF1100B - Mass Flow ...
AccuTherm - Model MF1100B -Mass Flow Controller for Precise Gas Flow Regulation
The MF1100 Mass Flow Controller by Accutherm offers extended capabilities for gas flow regulation with ranges up to 20 standard liters per minute (SLM). It is designed to provide superior temperature stability, making it suitable for various high-performance applications. The device can accurately control flow rates as low as 5 standard cubic centimeters per minute (SCCM) up to 20 SLM, offering versatility for different industrial needs. Key features include advanced temperature stability, a wide dynamic range, and multiple built-in functionalities to ensure precise control over gas flow processes. This makes it ideal for use in environments requiring stringent flow control and stability, such as semiconductor manufacturing, laboratory research, and chemical processing.
- MINIMUN RANGE OF 5 SCCM & UP TO 20 SLM
- COMPACT SIZE
- STANDARD SOFT-START FUNCTION
- MINIMUM LEAKAGE OF 1.013×10-9Pa·m3/s (He)
- Heat Treatment Furnace
- Diffusion Furnace
