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AST - Model AST-200 / 300H -Advanced Inspection & Metrology System
High-performance system designed for applications where high-speed defect detection and precision measurements on wafers and other parts are required. Can be configured as a dedicated production tool or as a versatile process development system. The system provides the ability to sort / bin wafers per defined criteria.
This automated and versatile platform can be configured with specialized optical paths across the spectrum utilizing precise part staging. The system offers significant and unique advantages for dual production/engineering use and provides the perfect solution when both defect detection and dimensional metrology are required.
The system can be configured or customized to meet your exact requirements with a variety of optical and illumination accessories, custom wafer/part fixtures, as well as custom operator interface, data formats and reports.