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- Axetris - Model OEM - Mass Flow Meter
Axetris - Model OEM -Mass Flow Meter
FromAxetris AG
The Axetris mass flow meter OEM-module (MFM) offers outstanding value to the customer. Platinum-based MEMS chip technology guarantees excellent stability and repeatability over the whole flow range. The high speed of MEMS technology combined with smart software processing along with rigid and robust packaging makes the MFM series an ideal choice for applications requiring small size, high stability, and fast response time. The product is currently available for communications over RS232 TTL or EIA, RS485 half duplex or full duplex and with analog signal (0-5V or 4-20mA).
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- Extra compact size
- Fast response time
- Excellent repeatability and accuracy
- High turn-down ratio >1000:1
- High long-term stability
- Target gas: Air; Ar; CO₂; He; H₂; N₂; O₂
- Flow Range (N2 equivalent): 0 - 10000 sscm
- Accuracy: 25 °C: ± 0.2 % F.S. / ± 1 % O.R.4; 0…50 °C: ± 0.5 % F.S. / ± 2 % O.R.
- Digital communication protocols: RS 485 HD/FD; RS232 TTL/EIA
- Analog communication voltage: 0 - 5 V
- Analog communication current: 4 - 20 mA
- Pressure: 0 - 5 bar
- Ambient temperature: 0 - 50 °C
- Response time: 4 ms
- Voltage supply: 12/24 V
- High measurement accuracy no regular re-calibrations needed
- Small footprint for easy integration
- Adapted to customer needs