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Axetris - Model Standalone -Mass Flow Controller
FromAxetris AG
MEMS-based standalone mass flow controller (MFC) designed for OEM applications, where shielding and IP40 protection are required. The platinum-based MEMS chip technology guarantees excellent stability and repeatability over the whole flow range. Due to their unmatched dynamic range and multi-gas capability, Axetris MFC modules can replace several conventional mass flow controllers with a single unit. The compact and robust design makes it also an ideal choice for portable applications as for example leak testing devices or any other handheld systems.
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- Fast settling time <150 ms
- Excellent repeatability and accuracy
- High turn-down ratio >1000:1
- Rigid stable design IP 40
- Target gas: Air; Ar; CO2; He; H2; N2; O2
- Flow Range (N2 equivalent): 0 - 10000 sscm
- Accuracy: 25 °C: ± 0.2 % F.S. / ± 1 % O.R.4; 0…50 °C: ± 0.5 % F.S. / ± 2 % O.R.
- Digital communication protocols: EtherCAT; PROFINET; RS 485 HD/FD; RS232 TTL/EIA
- Analog communication voltage: 0 - 5 V
- Analog communication current: 4 - 20 mA
- Pressure: 0 - 10 bar
- Ambient temperature: 0 - 50 °C
- Settling time: 150 ms
- Response time: 4 ms
- Voltage supply: 24 V
- Compact design with protection class IP40
- Reliable control performance with low maintenance
- Configuration according to customer requirements