Korvus Technology - Model HEX -Benchtop or Rack-mounted Compact System

The HEX Series by Korvus Technology exemplifies modular PVD systems tailored for different scales and requirements. The series comprises three variants: HEX, HEX-L, and HEX-XL. The HEX is a compact benchtop or rack-mounted system suitable for samples with a diameter up to 4 inches and supports up to three deposition sources. Its chamber volume, optionally stackable to 24 liters, caters to various deposition needs. The HEX-L features a mobile base stand and can handle larger 6-inch samples, offering enhanced flexibility with its 50-liter chamber volume and integration options like glovebox compatibility. For even greater sample dimensions, the HEX-XL can handle 12-inch samples with a substantial chamber volume up to 172 liters. It allows customization through various deposition sources, including advanced E-beam evaporators for ultra-thin films and RF/DC sputtering with SmCo magnets. These systems are designed to maintain precise control over deposition processes, ensuring reliable and uniform thin films for a multitude of applications.