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Robotechnik Environmental Equipment & Supplies
10 equipment items found
Manufactured by:Robotechnik Europe GmbH based inSingen, GERMANY
The future technology in the semiconductor industry and production- Coating System with "Covered Chuck" within process: Stand - Alone Spin Coating System with "Covered Chuck" technology" for Wafers up to Ø 8" (Ø 200 mm) and substrates up to 6" x 6" (150 mm x 150 mm), for traditional open bowl or covered chuck ...
Manufactured by:Robotechnik Europe GmbH based inSingen, GERMANY
The future technology in the semiconductor industry and production- Coating System with a process optimized covered chuck ...
Manufactured by:Robotechnik Europe GmbH based inSingen, GERMANY
Fully automatic cluster system for a wide protfolio of applications. Can be equiped with different Modules like Coaters, Cleaners, Developers, Hot-, Cool- and Primer-plates. Can Process Wafers up to 8" and Square Substrates up to 6"x6". ...
Manufactured by:Robotechnik Europe GmbH based inSingen, GERMANY
Automatic Microcluster Systems for Lithography Processes in the Semiconductor Industry. The fully-automated microcluster systems of the Maximus Series are designed for single-substrate production processes in the semiconductor industry. The system platform handles wafer sizes from Ø 2” up to Ø 750 mm and substrate sizes from 2” x 2” up to 500 mm x 500 mm. According ...
Manufactured by:Robotechnik Europe GmbH based inSingen, GERMANY
Fully automatic cluster system for a wide portfolio of applications. Can be equiped with different Modules like Coaters, Cleaners, Developers, Hot-, Cool- and Primer-plates. Can Process Wafers up to 8" and Square Substrates up to ...
Manufactured by:Robotechnik Europe GmbH based inSingen, GERMANY
The future technology in the semi conductor industry and production- stand alone Hotplate System for typical lithography baking ...
Manufactured by:Robotechnik Europe GmbH based inSingen, GERMANY
The future technology in the semi conductor industry and production- bench mounted Hotplate System for typical lithography baking ...
Manufactured by:Robotechnik Europe GmbH based inSingen, GERMANY
The future technology in the semiconductor industry and production- Stand Alone Spinner system for coating, cleaning and developing within ...
Manufactured by:Robotechnik Europe GmbH based inSingen, GERMANY
The future technology in the semiconductor industry and production- Coating Module with "Covered Chuck" within ...
Manufactured by:Robotechnik Europe GmbH based inSingen, GERMANY
Automatic Microcluster Systems for Lithography Processes in the Semiconductor Industry. The fully-automated microcluster systems of the Maximus Series are designed for single-substrate production processes in the semiconductor industry. The system platform handles wafer sizes from Ø 2” up to Ø 750 mm and substrate sizes from 2” x 2” up to 500 mm x 500 mm. According ...