BulkGas - Model 1500 Series -Gas Delivery System

Mass customization and modular esign concepts of the gas panels,  controls architecture and cabinet enclosure have been combined to widen the product configuration spectrum and greatly increase user flexibility.

From the Fab to the Lab to the University, SDC sets ts itself apart as the clear choice for value in today’s budget conscious environment.

Process Panel Features

• Ultra-High-Purity [UHP] 316L or  VAR construction
• Surface finish of 10Ra avg or better
• UHP diaphragm valves
• Application specific regulator
• Precision pressure transducers
• Vacuum assisted purge
• UHP orbitally welded with  strategic VCR breaks
• Helium leak tested to 1 x 10-9    atm*cc/s
• CLASS 100 / CLASS 10 clean room    assembled

Codes and Standards Referenced

• SEMI  S2
• CE mark
• ASME Section IX
• Factory Mutual
• ASMNFPA 79, 496, 70 [NEC]
• UL