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Hiden -Â Model IG5C- 5keV -Caesium Ion Gun for UHV Surface Analysis
The IG5C features a low power, high brightness, surface ionization source coupled to a compact ion column, providing high performance in a small package. The gun is designed as a primary ion beam for all SIMS applications, dynamic, static and imaging.
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Controlled via a windows PC based interface, which handles thermal management of the source, the gun is easy and reproducible to set up and can be configured for high current or small spot applications. Drivers for LabVIEW are also available to permit OEM integration into other systems.
- Air stable ion source
- Small mounting flange for flexible installation
- Easy installation of self aligning replacement sources
- Long source lifetime
- Differential pumping to maintain true UHV chamber pressure
- Two lens column design
- Easy replacement of beam defining aperture
- Controlled via a windows PC based interface, which handles thermal management of the source, the gun is easy and reproducible to set up and can be configured for high current or small spot applications.
- Diagnostic modes are instantly available with beam parameters (current and beam shape) measured on an electron suppressed Faraday collector and displayed live on the PC.
- Drivers for LabVIEW are also available to permit OEM integration into other systems.
High performance with a small form factor
The Hiden IG5C is a low power (5keV) caesium ion gun that provides high brightness surface ionisation with a conveniently small mounting flange for superb installation flexibility. Refer to the table below for full performance information:
- Primary ion: Cs+
- Ion energy: 0.5 to 5.0 KeV
- Minimum spot diameter: 20 micrometers
- Deflection field for mapping: +/- 4 millimeters
- Ion beam current: 0.1 to 150 nA
- Maximum Etch Rate: 30 nm/min for a silicon target