Ebara Technologies Inc
  1. Companies
  2. Ebara Technologies Inc
  3. Products
  4. EbaraTech - Model F-REX300 - Chemical ...

EbaraTechModel F-REX300 -Chemical Mechanical Polishing Systems

SHARE

EBARA’s Applications Engineering groups in Japan and the U.S. continue to push the envelope required for tomorrow’s devices. Whether this entails planarizing exotic new materials or providing proven solutions for today’s Copper, Oxide, Tungsten, or STI challenges across an array of technology nodes and device types, EBARA has a CMP system with industry leading technology options to meet your requirements.  EBARA is recognized as the benchmark for industry leading production and reliability standards and has been rewarded with continued year-over-year market share growth.

Most popular related searches
  • Proven EPO model Concepts Utilized
    • Dry-In / Dry-Out
    • 1 head on platen, 2 platens, 4 cleaning stations
    • Module design
    • Manufacturing support options: EPM, SMIF, and etc.
  • Throughput (Maximum designed output based on 2 min polish)
    • 50 = Parallel / 2 steps clean, 40 = Parallel / 3 steps clean
    • 25 = Serial Mode
  • New Features
    • 3 Step Chemical Cleaning
    • Buff Polish
    • 4 FOUP Loader Port (OHT, AGV available upon request)