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PMS - Model HSLIS-M100e -Chemical Particle Counter
The High Sensitivity Liquid in Situ (HSLIS-M100e) Chemical Particle Counter provides continuous, real-time particle monitoring of contamination levels in corrosive liquids, including hydrogen fluoride (HF), and is included in Particle Measuring Systems’ (PMS®) complete line of liquid particle counters. Sensitivity range: 0.1 - 1.0 μm.
Particle Measuring Systems’ HSLIS Liquid Particle Counter makes it easy to understand the characteristics of your working fluid. The combination of high sensitivity, and low cost makes this an ideal solution when large numbers of sensors and/or long-term trending are required. Integration of the HSLIS Liquid Particle Counter into FacilityNet Software provides an economical way to monitor multiple flow systems and provide dedicated local display and control capabilities.
Learn about our full line of particle counters.
For industry-leading 20 nm particle counters see the Ultra DI® 20 Plus or the Chem 20™.
Particle Measuring Systems engineers, manufactures, installs, calibrates, repairs, and maintains the HSLIS-M100e chemical particle counter.
- 4 channel chemical particle counter
- 0.1, 0.2, 0.5 and 1.0 μm particle monitoring size range
- Operates with an optimal flow rate of 300 ml/min. +/-10%
- Samples 1% of the flow volume or 3 ml/min
- Compatible with corrosive liquids, including hydrogen fluoride (HF)
- eSeries compatible with Facility Net Software
- Existing network can be used with ethernet communication to Facility Net Software
Sensitivity range: 0.1 – 1.0 µm
- Monitoring chemical delivery systems
- Measuring filter efficiency
- Episodic event tracking and alarming
- Continuous chemical particle system monitoring
- 4 channel chemical particle counter
- 0.1, 0.2, 0.5 and 1.0 μm particle monitoring size range
- Operates with an optimal flow rate of 300 ml/min. +/-10%
- Samples 1% of the flow volume or 3 ml/min
- Compatible with corrosive liquids, including hydrogen fluoride (HF)
- eSeries compatible with Facility Net Software
- Existing network can be used with ethernet communication to Facility Net Software
- Monitor for long term trends in fluid quality
- Control and monitoring of multiple particle counters using Ethernet
- Low initial capital investment and lower maintenance cost with proven reliability of the HSLIS design
- Tabular and statistical process control (SPC) charts for detailed statistical information
- Alphanumeric paging and e-mailing functions to alert operator of data excursions
- Sensor status displays four-level alarm for monitoring out-of-spec condition
- Simplified data interpretation with real-time and retrieved time plots
- Real-time particle monitoring within chemical distribution systems
- Point-of-process monitoring
- Chemical packaging operations monitoring
- Chemical filter performance and efficiency characterization
- Performance testing of chemical handling components

