CVD Equipment Corporation

CiphercoNModel 1500 -Fully Automated Haz Gas Cabinet

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CiphercoN 1500 Fully Automated Gas Cabinet is representative of SDC’s continuous drive and commitment to providing the industry’s safest and most reliable Ultra-High- Purity (UHP) specialty gas equipment available. Mass customization and modular design concepts of the gas panels, controls architecture and cabinet enclosure have combined to widen the product configuration spectrum and greatly increase user flexibility. From the Fab  to the Lab to the University, SDC sets itself apart as the clear choice for value in today’s budget-conscious environment.

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All welding and assembly is peformed in a 4000 ft2 CLASS 100/CLASS  10  clean  room facility by ASME Section IX Certified Weld Technicians.

Process Panel Features

  • Ultra-High-Purity (UHP) 316L SS or VAR construction
  • Surface finish 10 Ra avg. or better
  • Springless diaphragm valves
  • Tied-diaphragm process regulator
  • Precision flow sensor
  • Vacuum assisted purging
  • UHP orbitally welded with strategic VCR breaks
  • Helium leak tested to 1.0 x 10-9 atm*cc/s
  • CLASS 100 / CLASS 10 clean room assembly and tested

Dimensions*
1 cyl. - 24”W x 84”H x 19”D
2 cyl. - 24”W x 84”H x 19”D
3 cyl. - 36”W x 84”H x 19”D

  • Height dimensions include controller. Add 6.0” to width with cylinder heating option.


Codes and Standards

  • ASME Section IX
  • SEMI® S2 Safety Guidelines for Semiconductor Manufacturing Equipment
  • NFPA
  • 79, 496, 70 [NEC
  • Factory Mutual
  • UL
  • CE