I-Photonics - Model ORTUS 700 -Compact PIAD Coater for Research and Small Scale Production

The ORTUS 700 is a highly compact Plasma Ion Assisted Deposition (PIAD) coater that offers the full flexibility of the ORTUS platform. It is designed for research and development as well as small scale production. The system features a dome diameter of 620 mm and allows for the installation of various substrate holders. It supports a range of technological devices, including electron beam evaporation with three different sizes (EV M-6, EV M-8, EV M-10) and customizable crucibles. The unit also includes cleaning and assistance sources, like an End-Hall ion source with ion current density up to 1 mA/cm², suitable for precise application requirements. An accelerator with an anode layer achieves higher ion current densities. Additional components include a resistance evaporation source and an optical process monitoring system. For thermal processing, substrate heating systems with IR lamps and tubular heaters are available, enhancing the coater's versatility for diverse deposition needs.