PMS NanoAir - Model 10 -Condensation Particle Counter (CPC)

• Get insights from anywhere in your ultra-clean environment with this purpose-built 10 nm condensation particle counter. Increase uptime and improve yield.
• Ticked bullet point Monitor inside semiconductor process tools with the smallest form factor on the market
• Ticked bullet point Uninterrupted, maintenance-free monitoring for 12 months with continuous 24/7 measurements.
• Ticked bullet point Best false count rate of any CPC designed for ultraclean environment monitoring

The innovative working fluid handling system design is robust and efficient for 365 days of 24/7 continuous operation without the need for user intervention of any kind. A 10-port manifold companion (ParticleSeeker™) product is available for use in applications that require multiple sample locations to be monitored in programmed sequences or in pseudo-simultaneous ensemble fashion. Finally, the NanoAir is compatible with high-pressure inert gas when used in conjunction with PMS’ High Pressure Di user HPD III. Data can be viewed using PMS FacilityNet Facility Monitoring Software or transmitted directly to third party SCADA systems or process tool inputs.

The NanoAir is a purpose-built nanoparticle counter designed specifically for use in the most critical fab spaces in the following applications:

NanoAir: Point of Use (POU) Monitor

• The NanoAir can be used to monitor a single sample point 24/7, 365 days/year providing truly continuous and real-time particle activity.
• Its compact size makes it suitable for use in the most critical process areas.
• In stand-alone point of use applications, NanoAir will support sample tube lengths up to 10 m.

ParticleSeeker: Monitoring inside process tool Equipment Front End Module (EFEM) mini-environments

• The ParticleSeeker is a companion, multi-point aerosol sampler for the NanoAir, providing up to 10 distributed sample locations. This capability is ideal for applications requiring broad contamination monitoring with programmed sample point monitoring critical surfaces within the cleanest and most confined spaces in the fab.
• Up to 6 meters of sample tubing can be used for each manifold port. The ParticleSeeker and NanoAir provides the ability to monitor up to 120 m2 of space

HPD-III: High pressure inert gas monitoring

• Using the NanoAir particle counter with PMS’s HPD III (High Pressure Diffuser) enables real-time, continuous, high sensitivity measurement of high pressure bulk gases.

• The small form factor (16.5 x 20.2 x 15.2 cm) sets the standard for CPC’s designed for manufacturing and process control applications
• External volumetric size is over 80% smaller than the next smallest industrial CPC allows monitoring:
• within process tools in the most critical functional areas
• on congested high-pressure gas distribution utility pads
• Patent-pending, innovative, working fluidics design allows for 24x7x365 days operation without working fluid maintenance; thus avoiding any sampling and data collection interruptions
• Refills only 1x per year at annual calibration, capable of 15 months between refills with 24x7 full-time operation
• No potential for unwanted fluid migration during shipping, handling, and installation that is common in other industrial-application CPCs
• Ready for operation in under 20 minutes after connecting vacuum and power
• No internal pumps or fans, eliminating maintenance and potential particle generation
• Sample flow rate of 2.8 LPM and does not use sheath airflow, providing volumetric sampling capability
• Zero Count is < 1.5 counts/m  without the use of zero count subtraction schemes
• Results in best-in-class performance and enables use in ISO Class 1 environments

PMS™ Service Repair and Calibration
The PMS™ Service Repair and Calibration team is available to install, repair and maintain the NanoAir™ and Particle Seeker™.

• Only aerosol particle manifold on the market designed and purpose-built to handle particles
• down to < 10 nm
• 10 manifold points providing 120 m2  of fab/process space sampling coverage. Each sample
• tube can be up to 6 m in length
• Multiple modes of manifold Sampling:
• User Defined Sequence
• Ensemble samples all ports simultaneously
• Sync (via Dry Contact Relay) communicates with external fab processes in real-time to
• synchronize with events and follow movement within the environment
• Effectively eliminates crosstalk and other common nanoparticle transport handling problems

• The utilities interface “Base Station” retains all local configuration (Location, IP address, recipe settings) at the point of installation, allowing the ability to swap NanoAir and ParticleSeeker instruments, eliminating re-configuration downtime.
• Multiple Input/Output communication interfaces enable seamless SCADA data transfer, reducing process tool downtime
• Dry Contact Relay (x4) for selecting and synchronizing sequence modes (ensemble mode, user defined sequence, wafer flow path)
• 4-20mA analog inputs (x4) for additional sensors, such as Temperature, Relative Humidity, and Differential Air Pressure
• 4-20mA outputs (x2) for single channel particle data export to data handling and SCADA
• USB for Serial (service port)
• USB for flash memory
• Ethernet ports (2):
• PMS Ethernet Protocol for FacilityNet Software communication
• MODBUS over TCP/IP communication with process tools and other fab system interface
• DC Power ports (x2) allows a ParticleSeeker to share power with a NanoAir
• Vacuum port for house or external source  (>12 inHg)

• Size range: 10 nm (minimal detectable size @ D50)
• Aerosol flow rate: 2.8 LPM (0.1 CFM) ± 5%
• Sampling period: 0.2 to 3600 seconds, user-selectable
• Max. particle concentration: 200,000 #/3 @ 10% coincidence loss
• Zero count: < 1.5 #/m, No false count subtraction
• Volumetric sample %: 100% - no sheath flow
• Counting eiciency: 10 nm = 50% ± 20%, 15 nm = 100% ± 10%
• Calibration yearly: Instrument warm-up time 20 minutes, nominal
• Working fluid:
• Organic, non-toxic, non-flammable
• 240 ml total working fluid volume
• Working fluid consumption and instrument volume: 12 months between refills 240 ml total working fluid volume
• Sample tubing: Static Control Polyurethane Tubing 6 mm OD, 4 mm ID (PMS P/N: 1000026711)
• Sample tubing length:  10 m (33 feet)
• Laser classification: Class 1, complies with US 21 CFR 1040.10 and EN60825-1. Internally an enclosed Class 3B laser is used per EN60825-1.
• Data storage: >10,000 samples
• Dimensions (l,w,h): 8.0 x 6.0 x 6.5 in (20.3x 15.2 x 16.5 cm)
• Weight: 6.1 lb (2.8 kg)
• LED Indication: Power, flow error, laser error, activity, working fluid level
• Power:
• External AC to DC Power Supply:
• Input: 100 – 240 VAC, 50/60 Hz, 1.5 A
• Output: 24 VDC 5.0 A
• AC input voltage fluctuation shall not exceed ± 10%
• Communications
• Ethernet connectivity (PMS Proprietary)
• Modbus via TCP/IP
• Serial USB
• 4-20mA (4 analog input ports, 2 analog output ports)
• Dry contact relays (4)
• Operating temperature range: 50 – 90 °F (10 – 32 °C)
• Humidity range: 0 – 60% RH, non-condensing
• Operating pressure: 1 atm (ambient)
• Vacuum source: External,  12 inHg required, 2.1 CFM (0.1 CFM for sample flow & 2.0 CFM for cooling flow)
• Power: 24 VDC, 5 Amp
• Installation requirements (with external AC to DC power supply)
• Indoor use only
• Pollution degree 2
• Over voltage category I
• Ordinary protection (not protected against harmful ingress of moisture)
• External AC to DC Power Supply:
• Over voltage category II
• Class I Equipment (Electrical earth ground from the mains power source to the product input is required for safety.)
• Status Indicators
• Power button LED ring (4-color, operational states)
• Front edge and corner LED (4-color, operational states)
• Working fluid level indicator (8 level real-time detection)

• Sample ports: 10 ports supporting a single particle counting instrument
• Sample flowrate: 0.1 CFM
• Bulk flowrate: 0.2 to 0.3 CFM per port (nominal)
• Purge  time  between  ports: 0-30 seconds, user configurable
• Sample interval time: Minimum 1 second, Maximum 3600 seconds
• Sample modes: Sequential, Scanning, Ensemble Mode, Patterned
• Crosstalk ≥ 10nm: ≤ 0.01%
• Sample tubing: Static Control Polyurethane Tubing 6mm OD, 4 mm ID (PMS P/N: 1000026711)
• Sample tubing length: ≤ 6 m (20 feet) per port, sample tubing must be of equal length for all ports
• Fittings provided: 10 self-locking, 6 mm OD, push-fit fittings
• Vacuum required: ≥ 12 inHg VAC, 3.0 CFM
• Data storage: ≥10,000 samples
• Power
• External AC to DC Power Supply:
• Input: 100 – 240 VAC, 50/60 Hz, 1.5 A; Output: 24 VDC, 5.0 A; Current Draw: 1 A @ 24 VDC

• Dimensions (l, w, h): 8.2 x 5.4 x 4.7 in (21x14x12 cm)
• Weight: 2.2 lb (1.0 kg)
• Operating temperature range: 50 – 95 °F (10 – 35 °C)
• Humidity :range 0 – 60% RH, non-condensing