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PMS - Model HSLIS Series -Deionized Water Particle Counter
The HSLIS series is engineered to safeguard your critical processes by delivering continuous, real-time contamination monitoring in DI water and process chemicals including corrosive liquids such as hydrogen fluoride (HF). Ticked bullet point Several models available to meet a wide variety of applications. Ticked bullet point Cost-effective solution without compromise. Ticked bullet point Sensitivity: down to 0.05 µm in DI water and 0.065 µm in chemicals.
HSLIS counters provide cost effective, adaptable, and robust monitoring for early detection of contamination and to protect product integrity.
From ultrapure water to aggressive chemicals, HSLIS counters adapt seamlessly to diverse environments—including Class I, Div 2 hazardous areas—without compromising safety.
- e Series
- M50e: Sensitivity range: 0.05 – 0.2 µm
- M65e: Sensitivity range: 0.065 – 0.2 µm
- M100e: Sensitivity range: 0.1 – 1.0 µm
- HSLIS M65 ANSI/ISA-Compatible: Sensitivity range: 0.065 – 0.2 µm
- HSLIS M65 ATEX-ANSI/ISA-Compatible: Sensitivity range: 0.065 – 0.2 µm
HSLIS delivers a comprehensive data management solution designed for control, compliance, and actionable insights.
- Centralized Control via Facility Net: integrates seamlessly with Facility Net software, enabling centralized monitoring and control of multiple instruments across your facility.
- Real-Time and Historical Data Visualization: Simplified interpretation through real-time plots and retrieved time charts, plus tabular and SPC (Statistical Process Control) charts for trend analysis and process optimization.
- Automated Alerts and Notifications: Built-in alphanumeric paging and email functions notify operators of data excursions, ensuring rapid response to contamination events.
- Flexible Integration: Outputs include Ethernet communication, 4-20 mA signals, and RS-232 diagnostics, allowing integration with SCADA, PLC systems, or other industrial control platforms.
- Customizable Data Parameters: Users can configure cumulative vs. differential data, update intervals, raw vs. normalized counts, and scaling for each channel, tailoring the system to specific process needs.
HSLIS counters deliver reliable particle monitoring at a lower cost, providing strong protection for critical processes without unnecessary complexity.
HSLIS M65 ATEX-ANSI/ISA-compatible particle counters allow continuous real-time monitoring of fluid particle contamination levels in Class I, Div 2 and ATEX Ex ec nA op is IIC T4 Gc environments.
Easily integrates into Facility Net so ware (or existing SCADA system) to provide an economical way to monitor multiple flow systems.
- Packaged for easy installation into Class I, Div II and ATEX environments
- Particle measurement for solvents, chemicals and ultrapure water
- Simplify data analysis by using the same sensor throughout all of your fabs
- Low initial capital investment because packaging has already been completed
- Sealed package protects sensor from accidental chemical spills
- Simplified data interpretation and out-of-tolerance alerts with Facility Net
- Class I, Div 2 and ATEX environments
- Qualifying particle concentrations in flammable solvents
- Chemical delivery system monitoring
- In-line measurements in recirculating baths
- Quality assurance
- Continuous monitoring for process improvement
- 0.065 µm sizing sensitivity
- 4-20 mA outputs
- Sealed enclosure
- Stainless steel enclosure for solvent environments
- Size range: 0.065 - 0.2 µm
- Channels: 4
- Channel sizes: 0.065, 0.1, 0.15, 0.2 µm
- Optimum flow rate (ml/min): 100 ± 10% ml/min
- Sample volume: 0.6 ml/min
- Counting e iciency: 100% of the sample volume
- Maximum concentration1: 10,000 counts/ml
- Sample temperature: 167 °F (75 °C)
- Zero count level: < 2,000 counts/l
- Wetted surface materials: Teflon®, Kel-F®, Sapphire and Kalraz® 4079
- Dimensions (l, w, h): 18 x 16 x 9 in (46 x 41 x 23 cm)
- Weight: 31 lb (14.1 kg)
- Power: 100 - 240 VAC, 50 - 60 Hz, 1.0 Amp max.
- Laser classification:
- Class 1, complies with US 21 CFR 1040.10 and EN 60825-1.
- Internally an enclosed Class 3B laser is used per EN 60825-1.
- Calibration: Calibration materials used are traceable to the US NIST (National Institute of Standards and Technology)
- Environment Temperature: 50 - 90 °F (10 - 32 °C)
- Humidity: non-condensing
- Communications
- Ethernet: includes five (5) 4-20 mA outputs, four (4) particle channels, one (1) instrument status
- RS-232: one (1) input for set-up and diagnostics only
1 Greater than 90% accuracy (less than 10% coincidence loss) at maximum recommended concentration