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EBARA - Model EV-S - Dry Vacuum Pumps

EBARA - Model EV-S -Dry Vacuum Pumps

FromEBARA Precision Machinery Europe GmbH (EPME)

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The EV-S has the lowest power consumption in its class. The flexible rotation speed and idle mode make their contribution to save energy. In clean applications no N2 purge or nitrogen is required.

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dry vacuum pump

noise and vibration

scanning electron microscope

nitrogen purging

Significantly reduced energy consumption
Very small footprint
High profitability

Multi-stage lobe design engineered for application in clean and medium harsh processes as Load Lock, SEM, PVD, Ashing, Ion Implantation and Etch
Main pump and booster pump with energy saving DC motors
Intelligent control system
Low noise and low vibration
Adjustable pumping speed by RPM variation
Very small footprint
Low consumption of electrical power, cooling water and nitrogen
Idle mode for additional energy savings