EBARA Precision Machinery Europe GmbH (EPME)
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- EBARA - Model EV-M - Dry Vacuum Pumps
EBARA - Model EV-M -Dry Vacuum Pumps
The EV-M with its multi-stage lobe design is best used for harsh duty applications. It has a higher H2 pumping speed compared to screw type vacuum pumps. The idle mode provides additional energy savings. The EV-M is powerful with low energy demands. Water-cooled EV-M for harsh processes and reduced emissions.
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- High energy savings
- At point heating
- Multi-stage lobe design
- High flexibility
- Intelligent control system
- Fab space saving
- Multi-stage lobe design engineered for harsh application
- Enhanced by-procuct capability
- Enhanced reliability through high torque motors
- Main pump and booster pump with energy saving DC motors
- Intelligent control system
- Low noise and low vibration
- Adjustable pumping speed by RPM variation
- Very small footprint
- Low consumption of electrical power, cooling water and nitrogen
- Idle mode for additional energy savings
