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EddyCus TF (Thin-film) - Quality Assurance of Wafers and Thin Films
FromSURAGUS GmbH
The EddyCus TF inline series comprises standardized and customized hardware for integrated quality assurance in automated production lines. The applied eddy current techniques are clean, contactless and extremely quick and accurate. Offers for inline applications involve thickness and sheet resistivity measurement. One Eddy Current electronic is able to handle up-to 16 sensor pairs, which facilitates the comprehensive monitoring of deposition processes over the entire production width. The system is connected to a measurement PC or MES via Ethernet connection. The available hardware platform provides a high degree of variability that enables the setup of a fully application customized system.
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- Quality assurance of low and high conductive thin-films (e.g. Transparent Conductive Oxides, NanoWires, Carbon Nano Tubes)
- Sheet resistivity monitoring from 0.01 – 1000 Ohm/square (higher on request)
- Thickness measurements from 5 nm
- Other specifications on request
- Contact-free and real-time
- Single-point or multipoint measurement at up to 16 positions (more on request)
- Min. Sensor pitch of to 38 mm
- Production flow up to 100 mm/s (more on request)
- Customized systems considering design requirements of application
- Sandard gap sizes in transmission mode from 5 to 60 mm
- Vakuum option avaiable
- Combination with further measurements available (temperature, distance)
- Inline measurement traverse
- Inline measurement bridge with fixed 1 to 16 sensor pairs
- In-situ (e.g. in vaccum) measurement bridge with fixed sensor pairs
- Data exchange via Ethernet, RS-232, RS-485
- Integration of panel to depic measurement values at any location
- System control by use program library