The ATC-E Series Evaporation Systems can be configured for high rate, low rate, multi-layer and co-deposition applications depending on the chamber, sources, substrate carrier and general configuration chosen. Proper power, crucible liner or boat material, soak, and XY sweep decisions must be made for each material to be evaporated to ensure the desired rates, stability and film characteristics. Typically, materials with good heat transfer properties (eg. Al) do not require XY sweep but may require a liner (Au) whereas materials with poor thermal properties (eg. Cr) tend to tunnel and spit unless the e-beam power is diffused with an XY sweep. Proper substrate fixturing is required to obtain the best uniformity.
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AJA International -Â Model ATC-E HV Series -Electron Beam Evaporation Systems
AJA International's ATC-E HV Series Electron Beam Evaporation Systems are designed to deliver high-performance physical vapor deposition for various applications. These systems are built with robust stainless steel, box-style chambers, allowing for the integration of single or multi-pocket rotary e-beam sources and other thermal and ion/plasma sources. They are compatible with Knudsen cells and low-temperature evaporation cells for organic materials. Various options such as load-locks, QCM control, and substrate holders with dynamic features like tilting and planetary movement enhance functionality. These systems are adaptable for different deposition requirements, including high-rate and co-deposition, and they accommodate multiple evaporation sources to minimize cross-contamination through isolation shielding and individual shutters. The Phase II-Au computer control system, featuring an extensive user interface, offers both manual and automated processing modes, making it suitable for comprehensive and controlled thin film deposition processes.Most popular related searches
AJA International ATC-E HV Series Electron Beam Evaporation Systems are available in stainless steel, box-style chambers. These physical vapor deposition systems offer exceptional value while delivering optimal performance and utilizing top quality sub-components. They inherit many design features and common parts from the highly evolved ATC & ATC Orion sputtering tools and can be outfitted with a single or multi-pocket rotary e-beam source, thermal evaporation sources, ion / plasma sources, Knudsen cells, low temperature evaporation cells for organic materials and thermal evaporation furnace sources. In addition, these systems are available with load-locks, QCM control, heated or cooled substrate holders with tilting capability, planetaries, various pumping packages and automated control.
AJA offers a variety of sources on our ATC-E Series Evaporation Systems. The box-style chambers are best suited for rotary e-beam sources which are bottom mounted with a large, double-hinged, easy access loading door for service and loading. Spare ports on the chamber bottom straddling the linear e-beam source allow for the addition of multiple secondary thermal evaporation sources. Secondary thermal sources are typically optimized for specific materials (e.g. organics) or to allow co-evaporation capabilities. With two or more evaporation sources, isolation shielding and individual shutters are included to minimize cross contamination.
6-pocket, 15cc rotary e-beam evaporation source with (2) secondary thermal evaporation sources
6-pocket, 25cc rotary e-beam evaporation source with isolation shielding
6-pocket, 15cc rotary e-beam evaporation source with (2) 1cc evaporation furnaces for low-temp organics
4-pocket, 7cc rotary e-beam evaporation source with (3) secondary thermal evaporation sources