Entegris - Model 1000 -Solid Source Delivery Cabinet (SSDC)

As a fully automated delivery system for solid precursors, the SSDC 1000 enhances solid material supply for deposition process equipment by utilizing our larger versions of ProEvap containers including dual source container capability. Minimizes unnecessary downtime due to container changes leading to longer tool utilization and continuous chemical supply. Can be configured for carrier gas or vapor delivery modes to accommodate all solid precursors. Features fully automated purge, heat up, container change, and container switchover sequences. Minimizes pressure drop through the process manifold and utilizes multiple uniform heating zones, ensuring efficient and reliable continuous chemical delivery.