Eumetrys
Eumetrys - Model EFiT-TT -Compact Interferometer
FromEumetrys
EFiT-TT is a compact equipment allowing to measure layer thickness with a great simplicity. This interferometry tool is extremely flexible and is destined to laboratories, research institutes and semiconductor industry. Its reduced size will save space in your clean room and its low cost will not cut the budget you can allocate to your R&D.
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However, EFiT-TT capabilities will cover all your needs and applications on wafer or sample:
- Layer thickness measurement up to 9 layers at high speed
- Bandpass interference filters
- Composite multilayer film
- Trench
- Sub-micron pattern density estimation using Effective Medium Approximation (EMA)
- Local area crystallinity evaluation
- Measurement of film thickness distribution
- Density evaluation on porous film