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FäthMixing Systems

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Our mixing systems can meter wet chemicals/slurry with utmost precision via weighing scales or to flow fittings. Concentration and process reliability can be monitored dependably via the integrated analysis system. Customers can decide whether to chose semi- or fully automatic operation with a batch mode. The module includes a mixing tank, a day tank and a supply line. The system can also optionally be designed as a loop system.

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Overview of other properties:

  • Use of GEMÜ, Entegris and Swagelok components that have proven themselves in the semiconductor industry
  • Flexible programming and communication with superordinate control system
  • Safety devices ensure personnel safety
  • Outstanding purity
  • Commissioning and training on the system itself
  • CE Declaration of Conformity
  • Supply system from supply and distributor to the hook-up in high purity