Fäth GmbH
Fäth - Solvent System
FromFäth GmbH
This solvent system is designed in accordance with the ATEX directive and is suitable for installation in zones 1 and 2. It has a stainless steel housing with a collection tray and meets strictest requirements in terms of supply security and purity. German supervisory body TÜV approves the plant on-site in Klipphausen.
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If required, we can integrate a control system in the solvent system in accordance with the customer’s requirements, to monitor parameters like pressure, temperature, flow rate, valve strokes, pump strokes and leaks.
Overview of other properties:
- Use of GEMÜ, Entegris and Swagelok components that have proven themselves in the semiconductor industry
- Flexible programming and communication with superordinate control system
- Safety devices ensure personnel safety
- Outstanding purity
- Commissioning and training on the system itself
- CE Declaration of Conformity
- Supply system from supply and distributor to the hook-up in high purity
