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FäthSolvent System

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This solvent system is designed in accordance with the ATEX directive and is suitable for installation in zones 1 and 2. It has a stainless steel housing with a collection tray and meets strictest requirements in terms of supply security and purity. German supervisory body TÜV approves the plant on-site in Klipphausen.

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If required, we can integrate a control system in the solvent system in accordance with the customer’s requirements, to monitor parameters like pressure, temperature, flow rate, valve strokes, pump strokes and leaks.

Overview of other properties:

  • Use of GEMÜ, Entegris and Swagelok components that have proven themselves in the semiconductor industry
  • Flexible programming and communication with superordinate control system
  • Safety devices ensure personnel safety
  • Outstanding purity
  • Commissioning and training on the system itself
  • CE Declaration of Conformity
  • Supply system from supply and distributor to the hook-up in high purity