Fäth - Supply module

The redundant structure for pumps and filters increased the supply reliability increased. We also succeeded in improving the user friendliness in continuous operation and in the event of maintenance. The operator was involved in the design process from the outset.

An IBC with a volume of 1,000 litres was integrated in this module. However, other sizes from small 5 litre units to large tank systems are also conceivable.

Overview of other properties:

• Use of GEMÜ, Entegris and Swagelok components that have proven themselves in the semiconductor industry
• Flexible programming and communication with superordinate control system
• Safety devices ensure personnel safety
• Outstanding purity
• Commissioning and training on the system itself
• CE Declaration of Conformity
• Supply system from supply and distributor to the hook-up in high-purity design