Entegris, Inc.
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- Chemlock - Filter Housing Bowl
Chemlock - Filter Housing Bowl
FromEntegris, Inc.
Bulk and point-of-tool, filter-housing-bowl (component) with advanced cleanliness and flow rate performance in microelectronic applications. Paired with a Chemlock filter-housing-head to form the complete housing system.
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- Industry: Semiconductor (Wet Etch and Clean, Facilities, Photolithography, CMP), Flat Panel Display, Data Storage, LED, Solar
- Chemical: Aggressive Acids and Bases, Resist Stripper, Solvents, Slurry, Photochemicals, DI Water
- Installation Point: Point-of-Tool, Bulk
- Materials:
- Head, molded-on fittings, bowl, plugs: PFA 440 HP or equivalent
- O-ring: E-KFM
- Locking ring (nonwetted part): PVDF or GFPP (glass-filled polypropylene)
- Mounting hardware - nuts and bolts (nonwetted parts): PVDF
- Fluid connections:
- Flaretek® fitting, Super Type Pillar® fittings, Super 300 Type Pillar® Fittings, Pipe fittings, FNPT fittings
- Cartridge connections:
- Code 0 (dual 2-222 o-rings)
- Operating conditions:
- Maximum inlet pressure: 0.3 MPa (3.0 bar, 43 psi) @ 100°C (212°F), 0.75 MPa (7.5 bar, 110 psi) @ 25°C (77°F)
- Maximum operating temperature: 100°C (212°F)