Sempa - Fire Protection - Leak Containment and Abatement System (LCAS)

Energetic materials like pyrophorics such as Trimethylaluminum (and most other metal organics) used in numerous processes. However, pyrophoric substances do spontaneously ignite on air, hence carry an intrinsically huge risk for fire and potentially dangerous situation while they are used. There have been already too many even fatal incidents in the electronics industry using such precursor materials. CHEM’BOT LCAS is a state of the art Chemical Delivery System including a Leak Containment and Abatement System (LCAS). CHEM’BOT LCAS stands for the utmost in safety and reliability in semiconductor metal organic delivery systems.