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Bronkhorst EL-FLOW - Model F-111B -Gas Mass Flow Meters for Low Flow Rates
Bronkhorst model F-111B Mass Flow Meters (MFMs) are suited for precise measurement of flow ranges between 0,16…8 mln/min and 0,16…25 ln/min at operating pressures between vacuum and 100 bar. The MFM consists of a thermal mass flow sensor and a microprocessor based pc-board with signal and fieldbus conversion and a PID controller for optional mass flow control by means of a separately mounted control valve. EL-FLOW Select series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response.
The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen, DeviceNet™, EtherCAT, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols. The EL-FLOW Select design features optional Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.
- High accuracy (standard 0,5% Rd plus 0,1% FS)
- Rangeability in digital mode up to 1:187,5
- Fast response (down to 500 msec), excellent repeatability
- Optional Multi-Gas / Multi-Range functionality: freely programmable ranges and gas types
- Pressure ratings 64 / 100 bar (Multi-Gas / Multi-Range functionality up to 10 bar)
- High pressure versions available
- Analog I/O-signals, RS232-connection; optional on-board fieldbus interface
- Electro-chemical polishing of all surfaces
- Compact, modular construction
- Metal sealed and/or down-ported versions available
- Analytical/environmental equipment
- Gas flow monitoring in food, chemical and petrochemical industries
- Gas consumption measurement in gas distribution systems for internal accounting purposes
- Detection of gas leakage through objects
- Semiconductor manufacturing
- Surface treatment installations
Measurement / control system
- Flow range (intermediate ranges available) : min. 0,16…8 mln/min
- max. 0,16…25 ln/min
- (based on N2)
- Accuracy (incl. linearity) (based on actual calibration) : ± 0,5 % RD plus ±0,1% FS
- Repeatability : < 0,2 % RD
- Turndown ratio : up to 1:187,5 (1:50 in analog mode)
- Multi fluid capability : storage of max. 8 calibration curves;
- optional Multi Gas / Multi Range functionality up to 10 bar abs
- Response time (sensor) : typical 0,5 sec.
- Operating temperature : -10 … +70 °C
- Temperature sensitivity : zero: <0,05% FS/°C; span: <0,05% Rd/°C
- Pressure sensitivity : < 0,1% Rd/bar typical N2; 0,01% Rd/bar typical H2
- Leak integrity, outboard : tested < 2 x 10-9 mbar l/s He
- Attitude sensitivity : max. error at 90° off horizontal 0,2% at 1 bar, typical N2
- Warm-up time : 30 min. for optimum accuracy
- 2 min for accuracy ± 2% FS
Mechanical parts
- Material (wetted parts) : Stainless steel 316L or comparable
- Pressure rating (PN) : 100 bar abs
- Process connections : compression type or face seal (VCR/VCO) couplings
- Seals : standard: FKM/Viton®;
- options: EPDM, FFKM/Kalrez®, FDA and USP Class VI approved compounds
- Weight : 0,5 kg
- Ingress protection : IP40
Electrical connection
- Analog/RS232 : 9-pin D-connector (male);
- PROFIBUS DP : bus: 9-pin D-connector (female);
- power: 9-pin D-connector (male);
- CANopen® / DeviceNet™ : 5-pin M12-connector (male);
- FLOW-BUS/Modbus-RTU/ASCII : RJ45 modular jack
- Modbus TCP / EtherNet/IP / POWERLINK : 2 x RJ45 modular jack (in/out)
- EtherCAT®/ PROFINET : 2 x RJ45 modular jack (in/out)