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NANOCHEM - Model L-Series -Gas Purifiers
The NANOCHEM L-Series Purifier provides economical purification in multi-tool or single-source applications. Gas impurties such as moisture and oxygen adversely affect process quality. Those impurities are present in gas cylinders and can also be introduced through leaks in the line or during cylinder changes. NANOCHEM purification media react with such impurities to deliver consistently pure gas to the process, improving product consistency and yields.
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- Purification for all ultra-high purity applications from source to point-of-use
- Highest Lifetimes
- Best Impurity Removal Efficiencies
- Removes critical contaminants to sub parts-per-billion level
- End-Point detection available
- Enhances manufacturing process economy and improves equipment performance
- Provides consistently high purity gas under fluctuating inlet impurity conditions
- Improves component lifetime and reduces particle generation by removing moisture and volatile metals from corrosive gases
- Low overall cost of ownership
- Requires little or no conditioning of purification media
- Easy to install and operate. Does not require heating or cooling
- Resin refills available
- All metal parts, Type 316L stainless steel, Elgiloy or Nickel 200 (except Kel-F valve seat)
- Inlet and outlet springless diaphragm valves included
- Mounting bracket
- 0.003 pm particle filter with 99.9999999% retention (PTFE or 316L SS)
- Recommended for flow 10 seem (0.0006 NMVhr) up to150slpm(9NMVhr)
- Internal surface finish < 15 pin Ra
- Maximum allowance working pressure of 150 psig (1.13 MPa) with fiber-optic end-point detector or 500 psig (3.5 MPa) without end-point detector
- Maximum operating temperature of 70°C
Connections
- Female inlet and male outlet connections W VCR-compatible face seal fittings
Options
- Fiber optic end-point detector
- Not available with L-60 Model
- Bypass assembly for isolating the purifier from the gas stream
- Pneumatically-actuated valves
- Upgraded particle filter for higher flow applications
- Bellows valve