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CLEANSORB - Model PRIMELINE Series -Gas Treatment System
The CLEANSORB PRIMELINE series is a sophisticated range of dry bed exhaust gas abatement systems tailored for critical safety-oriented process applications, particularly in Metal Organic Chemical Vapor Deposition (MOCVD). These systems are designed to manage gas flows efficiently under stringent operating conditions. The PRIMELINE series includes models with varying configurations, such as the compact PS models featuring a supplementary column for continuous operations even when the primary absorber's capacity is exhausted. The larger PD model offers enhanced functionality with two full-size absorber columns and an additional backup column, ensuring uninterrupted operation. Maintenance is simplified as one column can continue to absorb gases with complete SEMI-S2-compliant safety while the other undergoes purging and refilling. CS CLEAN SOLUTIONS prioritizes environmental protection, integrating compliant safety controls within these systems to accommodate industry-specific requirements effectively.
The PRIMELINE series represents the fully-featured version of the CLEANSORB family of dry bed exhaust gas abatement systems. The system is especially engineered to handle the gas flows and related operating conditions of safety-critical process applications – notably those of Metal Organic Chemical Vapor Deposition (MOCVD).
The smaller-footprint CLEANSORB PS models feature a back-up column, allowing production to be run to completion even after the capacity of the main absorber column has become depleted. The larger CLEANSORB PD model incorporates two full-size absorber columns plus a back-up column; one main column can remain active absorbing exhaust gas with full SEMI-S2-compliant safety protection, while the second column is independently purged before removal from the cabinet for refilling.
- Dedicated CLEANSORB chemisorber media for critical MOCVD gases such as AsH3, PH3 or GeH4
- Optimized for safe thermal management of high flow silicon and III-V epitaxial processes
- Unique safety functions such as infra-red temperature monitoring and inert gas cooling
- Touch-screen control (PD model) with automated operating routines
- Available as SEMI-S2 compliant version with redundant safety features