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Hiden - Compact Secondary Ion Mass Spectrometry (SIMS) Tool
The Hiden Compact SIMS tool is designed for fast and easy characterisation of layer structures, surface contamination and impurities with sensitive detection of positive ions being assisted by the oxygen primary ion beam and provides isotopic sensitivity across the entire periodic table. The ion gun geometry set to provide is ideal for nanometre depth resolution and near surface analysis.
The Hiden Compact SIMS tool is designed for fast and easy characterisation of layer structures, surface contamination and impurities with sensitive detection of positive ions being assisted by the oxygen primary ion beam and provides isotopic sensitivity across the entire periodic table. The ion gun geometry is optimised to be ideal for nanometre depth resolution and near surface analysis.
A rotary carousel enables 10 samples to be simultaneously loaded for measurement into the dry-pumped vacuum chamber. The instrument has a small footprint and is exceptionally easy to use, it boasts the same control software and ion gun system as the fully featured Hiden SIMS Workstation family, providing depth profiles, 3D and 2D images and mass spectral data. The MAXIM-600P detector is based around the highly reliable Hiden 6mm triple quadrupole mass filter with pulse ion detection. An electron gun option is available for analysis of insulating samples.
In addition to SIMS, the Compact SIMS has an SNMS facility that is useful for quantification of high concentration elements, such as alloys.
- Small footprint
- Easy user friendly layout
- Requires only single phase electrical power (under 10A)
- Wheeled trolley design
- Positive SIMS and SNMS
- Depth Profiling
- 3D characterisation and imaging
- Mass spectra
- Isotopic analysis
- Analysis on the nanometre scale
A convenient solution for rapid surface composition analysis at the nanoscale
The Hiden Compact SIMS (secondary ion mass spectrometry) has a low form factor and simple, user-friendly layout, with outstanding isotopic sensitivity across the entire periodic table. See below for full specifications:
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- Mass range: 50, 300, 510 amu
- Minimum detectable concentration: ppm
- SIMS – Secondary Ion Mass Spectrometry: Yes
- Analysis of ions ejected from sample surface: Yes positive ions (negative ion option)
- SNMS – Secondary Neutral Mass Spectrometry: Yes – Option
- Depth resolution: 3 nm
- Minimum detectable concentration – Boron in Si: 1017 atoms cm-3
- Minimum detectable concentration – SNMS: 1%
- UHV multiport chamber: No, fixed geometry easy entry chamber
- Accommodates additional instrumentation: No
- Sample movement: Manual