Hiden - Model AutoSIMS - Fully Self-Contained Automatic Surface Analysis System
From Products for Surface Analysis
Hiden Analytical has developed a fully self-contained automatic surface analysis system in the AutoSIMS, an innovative secondary ion mass spectrometer (SIMS) that can perform routine and repetitive analysis with unattended operation. With a fully-automated X-Y stage and expanded holder, the AutoSIMS by Hiden can run hundreds of processes a day during uninterrupted 24/7 operation.
Overview
Hiden Analytical specializes in SIMS instruments for nanoscale depth profiling and quantitative surface analysis of myriad different sample types, from comprehensive workstations to compact SIMS solutions. The AutoSIMS comprises the same long-life oxygen-source primary ion gun and MAXIM analyzer found throughout the Hiden SIMS product line, with the addition of a modular cassette sample holder and a software-driven X-Y sample stage. This provides the basis for high-reliability detection of relevant surface spectra and three-dimensional (3D) depth profiles without human intervention.
The long service life of the ion gun ensures a consistent high-stability beam is generated throughout extended periods of operation, allowing the cassette holder and sample stage to deliver continuous sample doses for high throughput batch analysis. Even novice operators can program the automatic surface analysis system by tweaking the matrix of experimental parameters through a simple spreadsheet.
AutoSIMS by Hiden Analytical
The AutoSIMS automatic surface analysis system by Hiden can perform both static and dynamic SIMS analysis with nanometre depth resolution, with complete independence. It can also be run in manual mode for expert users looking to exploit the full raft of technical possibilities available to them.
Features
- Fully automated, unattended, SIMS analysis
- Large X-Y sample stage
- Oxygen ion gun for sensitive analysis
- Customizable cassette style sample holder
- Parameters can be specified via spreadsheet
- 3D characterisation
- Nanometre depth resolution
- Modular servicing for high up-time
Technical Specifications
A robust surface analysis solution for high throughput operations, the AutoSIMS can perform hundreds of processes a day without operator intervention. Browse a typical set of specifications below:
- Mass range: 50, 300, 510 amu
- Minimum detectable concentration: ppm
- SIMS – Secondary Ion Mass Spectrometry: Yes
- Analysis of ions ejected from sample surface: Yes positive ions (negative ion option)
- SNMS – Secondary Neutral Mass Spectrometry: Yes – Option
- Depth resolution: 3 nm
- Minimum detectable concentration – Boron in Si: 1017 atoms cm-3
- Minimum detectable concentration – SNMS: 1%
- UHV multiport chamber: No, fixed geometry easy entry chamber
- Accommodates additional instrumentation: No
- Sample movement: Automatic X, Y
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