Hiden Analytical Ltd.

HidenModel TPD -Workstation System for UHV Temperature Programmed Desorption (TPD/TDS) Studies

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The TPD Workstation features a multiport UHV chamber with heated sample stage coupled to a high precision triple filter analyser with digital pulse ion counting detector for ultimate sensitivity and time resolution.

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The Hiden TPD Workstation is a complete experimental system for UHV temperature programmed desorption (TPD) studies. The triple filter mass analyser is configured with a cooled shroud giving the analyser optimum sensitivity with minimum background contributions to desorption products from the sample. A fast sample load lock with sample transfer mechanism is included to provide for rapid sample change.
  • Hiden 3F PIC Mass Spectrometer for fast data acquisition (>500 data points per second)
  • Multiport UHV chamber for attachment of additional instrumentation (e.g. Ellipsometry)
  • Linear sample transfer mechanism and loadlock, including gate valve and viewport
  • Heated sample stage to 1000 °C
  • Z-drive for optimum sample/detector positioning
  • Bakeout Jacket (200 °C max)
  • Integrated Software control of experimental protocols
  • Mass range: 50, 200, 300 or 510 amu
  • Mass Spectrometer: Triple Filter Quadrupole
  • Detector: Pulse Ion Counter (PIC)
  • Sample size: Typically 10 x 10 mm
  • Minimum detectable pressure: 5 x 10-15 mbar
  • Maximum operating pressure: 5 x 10– 6 mbar
  • Maximum sample stage temperature: 1000 °C
  • Fast measurement speed: Up to 650 measurements per second