E-H-Metrology - Model MX 10x Series -High Resolution Wafer Tool

The MX10x series measure thickness and thickness variation on silicon wafers. It has a resolution of 10 nanometers and can be adapted to different thickness ranges within a few seconds. Before starting to scan the wafer, the gauge recalibrates itself automatically by means of a standard thickness gauge block. A pair of capacitive sensors samples four radial profiles (45 degrees) on every wafer.