PMS Ultra DI - Model 20 Plus -High Sensitivity Liquid Optical Particle Counter for Ultra Pure Water (UPW)

The Ultra DI-20 Plus thermally stabilizes the measurement of particles across a 18 to 29°C operating environment delivering unmatched instrument to instrument data stability and matching. This particle counter offers instrument matching within 20% at concentrations of >2 particles per ml which is o en required by the current semiconductor industry. With this product, you can have confidence in your UPW data regardless which specific particle counter unit you use. You are able to freely swap particle counters or compare data across sites with confidence the data are comparable. This comparibilty applies to Fabs across town or to Fabs across the globe. This also simplifies annual equipment calibration logistics because instruments in the fleet can be swapped without disruptions or questions about the data.

The Ultra DI-20 Plus ensures complete accuracy by carefully controlling the environment inside the instrument case. No matter where you place the unit, the UDI-20 Plus will continue producing the most accurate and repeatable 20 nm particle data possible. It also eliminates the additional purchase price and maintenance cost for an environmental enclosure.

Engineered for the Most Demanding UPW Applications
Improve product throughput by acting faster for optimum process control. The Ultra DI water particle counter line provides groundbreaking capabilities and sets the standard for UPW monitoring applications.

Engineered for the Most Demanding UPW Applications
Improve product throughput by acting faster for optimum process control. The Ultra DI water particle counter line provides groundbreaking capabilities and sets the standard for UPW monitoring applications.

Unmatched accuracy & high sensitivity
Detect particles down to 20 nm for reliable process monitoring.

Trend changes are detected quickly to identify and help resolve contamination events.

• Low zero count
• Low zero count and high counting efficiency ensure confidence in every measurement.

Environmental Stability
Maintain accuracy and reliability across cleanrooms and variable process conditions including:

• thermal
• humidity

• Advanced laser optics and sensors enable detection of particles down to 20 nm (9 nm Au)
• Quickly obtain meaningful statistical data to detect particle excursions and troubleshoot problems
• Fast sample cleanup shortens the time to move from one sample point to another
• Respond immediately to contamination with real-time particle measurement
• Eliminates the additional purchase price and maintenance cost for an environmental enclosure

• Unmatched instrument to instrument data stability and matching with thermally stabilized measurements of particles across a 18 to 29°C operating environment
• Instrument to instrument matching within 20% at concentrations of >2 particles per ml
• Compare UPW system performance across multiple fabs in any environmental conditions anywhere in the world
• Fleet can be swapped without disruptions or questions about the data
• Two counting modes
• High resolution – for pure environments
• High concentration – for filter challenge tests and lower purity environments
• Connect directly to PLC and SCADA systems with 4-20 mA and utilize existing network with Ethernet communication

• Quantifying particle concentration in state-of-the-art ultrapure water (UPW) systems
• Filter efficiency measurements
• Trending analysis at lower particle concentrations
• Detecting bacterial growth in UPW systems
• Episodic event tracking and alarming
• Continuous system monitoring

• Channels: 4
• Channel sizes: 20, 50, 70, 100 nm
• Flow rate (ml/min): 75 ml/min ± 10%
• Counting Eiciency: 100% of sampling volume
• Sample temperature: 59 – 122 °F (15 – 50 °C)a
• Maximum pressure: 100 psi
• Zero count: ≤ 50 counts/L b
• Exterior surface: 316L Stainless steel
• Wetted surface materials: Teflon®, Kel-F®, fused silica, Viton®, 96% Alumina Ceramic, and Simriz®: 485
• Dimensions: (d, w, h) 20.0 x 16.8 x 14.5 in (50.8 x 42.7 x 36.8 cm)
• Weight: 71 lb (32.2 kg)
• Communications:
• Ethernet
• 4-20 mA (5 outputs: 4 particle channels, 1 instrument status)
• RS-232 (set up and diagnostics only, no data)
• Status indicator: Laser, power, and activity: one (1) tri-color LED
• Calibration: Materials used are traceable to National Institute of Standards and Technology (NIST)
• Electrical Rating: 100 - 240V, 50 - 60 Hz, 5.0 A
• Fuses: 250 V, 5 x 20 mm, 5.0 A
• Voltage fluctuation: AC input voltage fluctuation shall not exceed ± 10%
• Laser classification:
• Class I complies with US21 CFR 1040.10 and EN60825-1.
• Internally an enclosed Class IV laser is used per EN60825-1.
• Operates with enclosure dorr open or closed