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NANOCHEM - MiniSentry - In-Line Purifier
The NANOCHEM MiniSentry Purifier is a compact purifier designed for placement internal to the process tool, delivering the gas purity required in a sub-micron fabrication environment. This product is an in-line purifier for low-flow point-of-use applications, combining gas purification and particulate filtration in a footprint of only 3.31 inches (84 mm). NANOCHEM purifiers provide insurance against virtually all process variables that cause contamination, including gas impurities introduced through the gas jungle. A typical location for this product would be directly before the process chamber or mass flow controller. The MiniSentry filter/purifier is a direct replacement for in-line particle filters.
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- Purification fcr point-of-use applications
- Highest Lifetimes
- Best Impurity Removal Efficiencies
- Removes critical contaminants to sub parts-per-billion level (<0.1 ppb in inert gases)
- Diffuson barrier at purifier inlet and outlet
- Reduces media exposure to atmospheric air during purifier installation
- Enhances manufacturing process economy and improves equipment performance
- Provides consistently high purity gas under fluctuating inlet impurity conditions
- Improves component lifetime and reduces particle generation by removing moisture and volatile metals from corrosive gases
- Compact size for ease of installation
- No moving parts or power requirements
- Does not require heating or cooling
- Low overall cost of ownership
Specifications
- Flow rates up to 1.0 slpm (0.06 NMVhr)
- All metal parts, Type 316L stainless steel
- 0.003 urn PALL Ultramet-L stainless steel particle filter with 99.9999999% retention
- Outer diameter of 0.84 inches (21.5 mm) and total length of 3.31 inches (84.07 mm)
- Internal surface finish < 15 uin Ra
- Maximum allowable working pressure of 3000 psig (21 MPa)
- Maximum operating temperature of 70°C
Connections
- Male inlet and outlet connections VA inch, VCR-compatible face seal fittings