Chrysalis Scientific Technologies Inc.
NANOCHEM - OMX-Plus - Inert and Flammable Gas Purifier
The Next Generation Purifier for Inert & Flammable Gases. All the Benefits of NANOCHEM OMX with Efficient Hydrocarbon Removal NANOCHEM OMX purification medium has long been the industry standard for purifying inert and flammable gases for a variety of semiconductor applications, including low temperature SiGe Epi. NANOCHEM OMX-Plus offers all the benefits of NANOCHEM OMX medium — the highest lifetimes and the best efficiencies for impurity removal as well as patented true endpoint detection to give advance warning of purifier depletion. OMX-Plus also offers removal of trace non-methane aliphatic and aromatic hydrocarbons from source gases and system component outgassing.
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- Direct purification of inert and flammable gases used in
- ultra-high purity applications:
- Highest Lifetimes
- Best Impurity Removal Efficiencies
- Patented Fiber-Optic End-Point Detection available
- Removes Oxygenated Species (H2O, O2, CO, CO2, NOx, SOx, etc.) and non-Methane Hydrocarbons (NMHC)
- Improves and ensures gas purity for process consistency: higher
- yield / device quality
- No external power source required
- Does not require heating or cooling
