INDEOtec SA

INDEOtec SA

Infrared Laser-Based Silane Sensor

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Direct absorption measurement of SiH4 in the infrared. Measurement in the exhaust or in the reactor of PECVD systems. Steady-state or time-resolved measurements. Determination of the SiH4 consumption efficiency, the SiH4 concentration in the plasma, and more. Compact & flange-mountable.

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