Despatch - Infrared Thermal Diffusion System

Diffusion technology for the industry’s most uniform emitters. The Despatch In-line Diffusion Furnace incorporates advanced infrared thermal technology that provides the tight temperature uniformity needed for increased cell efficiencies. Air is passively preheated as it enters the chamber and lamps on top and bottom along with edge heaters effectively transfer heat to the wafers. Automated drop-down access to the chamber reduces maintenance time and the insulation in the first zones of the furnace is easily removed if it becomes contaminated. The furnace provides advanced profile capability and a fully comprehensive software system.